1. 연수기간 : 2021. 12. 06 ~ 2021. 12. 10 (총 4박 5일)
2. 연수국가 : Jeju, Korea
3. 연수기관명 : KPS (The Korean Physical Society)
4. 연수자 : 박사과정 3기 참여대학원생 1명
5. 연수주제 : Terahertz conductivity of high-quality Indium film by low temperature deposition
The In film which is fabricated using substrate cooling process in thermal chemical vapor deposition (CVD) formed a highly uniform surface morphology and it provides a clean van der Waals (vdW) interface without disorder or defect. Here, we compared morphology and terahertz complex conductivity of In films deposited at room temperature and low temperature (~ 100 K) substrate by using scanning electron microscope and terahertz time domain spectroscopy, respectively. As a result, while the In film deposited at room temperature showed a segmented granular form with relatively low terahertz conductivity, the In film deposited at low temperature showed an interconnected film form that performs metallic characteristics above ~ 30 nm hickness. Our results suggest that the substrate cooling method is promising for the fabrication of high-quality metal film and metal contact applications.