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[단기연수] 211206 - 211210 The 12th ICAMD 2021 3
2021-12-21 14:38:51 조회수363

1. 연수기간 : 2021. 12. 06 ~ 2021. 12. 10 (총 4박 5일) 

2. 연수국가 : Jeju, Korea

3. 연수기관명 :  KPS (The Korean Physical Society)

4. 연수자 : 박사과정 3기 참여대학원생 1명

5. 연수주제 : Terahertz conductivity of high-quality Indium film by low temperature deposition

   The In film which is fabricated using substrate cooling process in thermal chemical vapor deposition (CVD) formed a highly uniform surface morphology and it provides a clean van der Waals (vdW) interface without disorder or defect. Here, we compared morphology and terahertz complex conductivity of In films deposited at room temperature and low temperature (~ 100 K) substrate by using scanning electron microscope and terahertz time domain spectroscopy, respectively. As a result, while the In film deposited at room temperature showed a segmented granular form with relatively low terahertz conductivity, the In film deposited at low temperature showed an interconnected film form that performs metallic characteristics above ~ 30 nm hickness. Our results suggest that the substrate cooling method is promising for the fabrication of high-quality metal film and metal contact applications.

     
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